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- Parallel Adjustment Methods between Template and Substrate in Nano Imprint Lithography 纳米压印光刻中模版与基片的平行调整方法
- nano imprint lithography 纳米压印
- Aiming at the lost accuracy happened in HEL(hot embossing lithography) because of thermal distortion ,room-temperature imprint lithography is proposed. 针对热压印光刻工艺中因热变形而导致精度丧失的问题,提出了冷压印光刻。
- An ultra-precision alignment technique adopting a pair of special slant gratings was presented for room-temperature imprint lithography. 为满足多层冷压印光刻中套刻的超高精度要求,提出了基于斜纹结构光栅的对正技术。
- Due to the diffracting limitation of the photolithography, imprint lithography technology, which maybe next generation lithography technology, is described. 针对微纳制造中光刻环节的光衍射限制,讨论了可能成为下一代光刻技术路线的压印光刻。
- Considering that step-by-step imprint lithography process is used in practice commonly，the corresponding alignment marks in every subarea are designed. 考虑到实际中通常采用分区步进压印工艺，因此在基片上的每一个压印分区都设计有相应的对准标记。
- A Novel Two-Step Alignment Technique for Imprint Lithography 压印光刻中的两步对正技术
- Study on the ultra-high resolution imprint lithography 高分辨率常温压印光刻工艺研究
- Design and Optimization of Resist Film in Imprint Lithography Alignment Process 压印光刻对准中阻蚀胶层的设计及优化
- Her face bore the deep imprint of suffering. 她的脸上带着受过苦难的深深的痕迹。
- His head left an imprint on the pillow. 他的头在枕上留下印痕。
- Her speech left its imprint on me. 她的演讲给我留下了深刻印象。
- Thermally Induced Error Analysis for the Imprint Spindle of High-Precision Imprint Lithography Tools 高精度压印机压印轴的热误差分析
- Mark image geometric distortion calibration in alignment system for multilevel imprint lithography 压印对正系统中标记图像几何畸变的校正
- Research of Measurement and Measuring Error of Laser Interferometer in Step Imprint Lithography 基于分步式压印光刻的激光干涉仪纳米级测量及误差研究
- Investigation to Ultra-Resolution Resist in Room-Temperature Imprint Lithography 冷压印光刻中高分辨率抗蚀剂的研究
- Nano technology will soon pervade the world. 奈米科技将很快普及于全世界。
- Model for the calculation of slant grating alignment signals of room-temperature imprint lithography 冷压印光刻中斜纹光栅对准信号计算模型
- Auxiliary Nano Pump rigs are now stacking nerfed. 辅助纳米聚合器现在不能重叠。
- The graphic arts include calligraphy and lithography. 平面造型艺术包括书法和平版印刷术。
