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Research on Vacuum Packaging Process, Equipment and Vacuum Degree Detection of MEMS Devices MEMS器件真空封装工艺、装备及真空度检测的研究
vacuum degree detection 真空度检测
In order to analyze the relationship between the vacuum degree in vacuum breaker s arc extinguish chamber and potential on shielding cover,a test system was designed to detect the potential. 为分析真空断路器灭弧室内真空度(即内部气体压强)与屏蔽罩上电位的关系,设计了一套模拟真空断路器运行环境和检测屏蔽罩上电位的试验系统。
The vacuum degree will decreased in shift to decrease the efficiency of evaporation. 切换时真空下降,蒸发受影响,有时会冲料。
The higher vacuum degree was, the higher were the overheating degree and dehydrating efficiency on mushroom surface. 真空度高,香菇表面干燥介质的过热度及去水效能越高。
The vacuum degree within the vacuum interrupter will have the direct effect upon the properties of vacuum switch. 真空灭弧室内真空度将直接影响真空开关的性能。
Germany Busch Vacuum Pump, which owns high vacuum degree, low noise and long service life, is adopted. 德国贝克的真空泵，真空度高，噪音低，寿命持久。
Analyses the source of non-condensable gas and its bad impact on Lithium Bromide absorption chillers. Presents the management methods of air tightness and vacuum degree. 摘要分析了机组不凝性气体的来源，并阐述其对机组的不利影响。介绍了机组气密性管理和真空度管理的方法。
Although the vacuum piping system passes the gas leakage test, it shall also bear a test of vacuum degree prior to the linkage trial run of the vacuum system. 真空管道在气体泄漏性试验合格后,真空系统联动试运转时,还应进行真空度试验。
As the concentrated heat can also cause the losing exergy, the vacuum degree should be increased and the evaporation system should operate in low temperature condition. 由于浓缩热引起的（火用）损也是不容忽视的，应提高系统的真空度，采用低温蒸发路线。
In order to solve the problem of measuring the vacuum degree in vacuum packaged MEMS devices,crystal oscillator has been used as the sensor to measure the vacuum degree. 为了解决MEMS器件真空封装内部真空度测试难题,提出采用晶振作为传感器来对内部真空度进行测量,设计并研制了一套基于晶振传感的真空度测量系统。
The application result after transform showed that the vacuum degree of the filter was obviously higher, and the qualified deoiling wax yield increased by 5 percentages. 改造后的应用结果表明,过滤机的真空度明显提高,在保证脱油蜡质量合格的情况下,产品收率提高了5个百分点。
The experimental results showed that an appropriate vacuum degree and volume fraction of liquid should be chosen for maximizing the cooling capacity of the evaporator. 实验结果表明，采用适当的真空度和液容率，可以提高微槽群蒸发器的散热效果。
According to the measurement demands of vacuum degree in the power system, this thesis summarizes the elementary principle of multi-functional high accuracy intelligent manometer. 我们应电力行业对真空度的测量要求而研制开发了高精度多功能智能真空度测试仪，该论文对其设计和实现原理进行了论述。
Vacuum calibrator is built on the basis of separate shaping technique, and the quick vacuum adjustment system ensures the vacuum degree and quick shaping. 真空定型台采用分腔定型技术，快速真空调节系统保证稳定的真空度和管材快速成型；
circular degree detection system 圆度测量系统
level degree detection of underwater dam surface 水下坝面平整度检测
Abstract: The main factors influencing mould-filling of evaporated pattern casting,including foamed plastic pattern(white pattern),coating,dry sand,vacuum degree,liquid metal,pouring system,foundry method et al,was introduced. 文摘:介绍了影响消失模充型的主要因素：白模、涂料、干砂、负压、金属液、浇注系统、工艺因素等。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree. 针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。