on the contrary, the growth of the coatings is nanocrystalline- amorphism, so the coatings is not a lot thin and has much defects and a low hardness but a good adhesion.

• 而基底温度，负偏压较低时，涂层的生长方式纳米微晶-无定形(Ti2N微晶-CNx无定形)，涂层厚缺陷多，硬度不太高，附着力很好。