elements uncooled infrared detector arrays based on Ba 0.8 Sr 0.2 TiO 3 thin films have been fabricated with a Micro Electro Mechanical Systems(MEMS) technique.

• 采用半导体微机械 (Micro Electro MechanicalSystem ；MEMS)技术制备了具有热隔离微桥的 8× 8元非致冷Ba0 .；8Sr0