With the increase of air or CO 2 in reaction gases, the microhardness of Ti(CNO) films can be raised. And the highest microhardness of Ti(CNO) film appears when the flow rate of air is 40 mL/min or the flow rate of CO 2 15 mL/min.

• 随着反应气体中空气或CO2气体流量的增加，Ti（CNO）薄膜的硬度呈上升趋势，并在空气的流量为40mL·min－1或CO2的流量为15mL·min－1时（分别约占气体总量的15%25和6%25），薄膜的硬度达到最大值。