With the emergence of micro gas sensors,more attention has been paid to semiconducting metal oxide thin films because of the advantages of high sensitivity,low thermal mass and batch production.

• 随着微结构气敏传感器的出现，金属氧化物半导体薄膜因具有灵敏度高、热质量小、批量制备一致性好等特点受到日益广泛的重视。