With the Ultra Large Scale Integrated Circuit (ULSI) feature size continues scaling down , the contact resistance of contact and via is more and more important to the entire circuit performance.

• 随着超大规模集成电路特征尺寸的持续缩小，超大规模集成电路的接触孔(Contact) 和通孔(Via)的接触阻值对整个器件的性能越来越重要。