With swift developing of nanotribology and microelectromechanical system ( MEMS) , microtri-bology of MEMS is one of the most active research areas in nanotribology.

• 随着微型机电系统(MEMS)的快速发展,MEMS摩擦学已成为纳米摩擦学研究中最活跃的前沿领域之一。