Using PZT stacks as micro driving elements, a 3-D.O.F high precise mobile positioning microrobot based on the inch-worm driving principle is designed in this paper.

• 使用压电陶瓷堆材料作为微驱动元件,设计了一种三自由度基于尺蠖蠕动原理工作的精密移动定位微小型机器人。