Under the condition corresponding to the highest creation rate of active species (N +,N f),Suitable decrease in gas pressure,and increase in discharge voltage and gas temperature will be beneficial to the active particles reaching a cathode.

• 在活性氮粒子 (N+ ,Nf)产率最高的放电条件下 ,适当降低放电气压 ,提高阴极位降和气体温度 ,有利于两种活性氮粒子 (N+ ,Nf)达到阴极。