Transparent and conductive oxides CdIn 2O 4 (CIO) thin films were prepared by RF reactive sputtering from a Cd-In alloy target in Ar+O 2 atmosphere.

• 在Ar+O2 气氛 ；采用射频反应溅射Cd In靶制备CdIn2 O4 (CIO)薄膜 .