To design and optimize a 3D micro electro-mechahical system(MEMS) micro tactile sensor for dimension measurement of micro structure, a mechanical module of sensor under transverse load is presented.

• 提出了一种用于微结构几何量测量的MEMS三维微触觉式传感器在横向负载下的力学模型；用于指导传感器的设计和优化.