Ti/Cu/Ni/Au metal is introduced as the CPW electrode material,and good contact with Ta_2N thin-film is guaranteed accordingly. Therefore,the typical reflection coefficient of the submount is reduced to be lower than-21 dB up to 40 GHz.

• 采用Ti/Cu/N i/Au金属材料作为CPW传输线电极材料；从而保证CPW传输线与Ta2N电阻材料之间良好的电接触；使热沉的典型反射系数在0~40 GHz范围内均达到优于-21 dB的水平.