This study is proposed to measure the straightness error, yaw error, pitch error of motion stage by using Quad Detector and Laser Doppler Displacement Meter.

• 摘要:本研究运用四象仪量测系统与雷射都卜勒位移器针对设计之摩擦式导轨移动平台进行直线度、偏摇度及俯仰度误差量测与分析。