This paper takes use of the features of ultrasonic grinding which can make the macroscopic force,stress and calory in grinding lower,and then utilizes relevant abrasive in the ultrasonic grinding.

• 本文利用超声加工宏观磨削力、磨削应力、磨削热小,对加工材料表面损伤低的特点,再结合相关磨料对高精度超薄水晶片表面进行超声磨削加工。