This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.

• 从基于微机械光电系统(MOEMS)的倾斜下电极扭臂式光开关出发,求解雷诺方程,得到空气压膜阻尼系数和阻尼力矩的分析公式。