This paper introduces the application of laser ablation with mask exposure,laser writing with raster scanning and LCVD techniqe in three dimensional micromachining for MEMS.

• 介绍了激光掩模投影直刻技术，聚焦激光束光栅扫描技术及激光辅助化学气相沉积等在微机械加工技术中的应用。