This paper introduces a novel cell sensors chip which integrated the micro electrode array (MEA), cell electro-impedance (ECIS) and light addressable potentiometer sensors (LAPS) and designed by us for the detection of cell physiological parameters.

• 本文介绍了我们自主设计的用于集成细胞电生理测试的光寻址电位传感器LAPS和微电极阵列MEA以及细胞电阻抗ECIS传感器芯片, 分析了其原理和器件的界面模型以及制作工艺。