This paper describes the UV proximity printing method to fabricate micro-optical elements, such as microlens array, micro-waveguides and high numerical aperture microlens.

• 本文的重点是介绍以近接曝光之光刻微影术进行微光学元件制作开发，具体元件如微透镜阵列、光波导、高数值孔径微透镜等。