They are the conventional single source/drain TFT, the Lightly-Doped-Drain (LDD) TFT and the large-angle-tilt-implantation-through-spacer (LATITS) TFT.

• 接著，我们研究用不同的制程参数所形成的LATITS薄膜电晶体的电特性，例如LATITS的布植剂量、布植能量及布植角度。