Thermodynamic analyses for the superhard inorganic material, such as SiC, Si 3N 4,TiC,TiN and so on, nanosized powder CVD synthesis processes were made systematically.

• 通过热力学分析研究了超硬无机材料，如SiC、Si3N4、TiC、TiN等纳米粉末的化学气相沉积（CVD）合成反应过程和核化过程的有关热力学规律。