Then, with the electromagnetic model we simulated the influence of the weak magnetic field to the performance of capacitively coupled RF discharge in low pressure and high pressure respectively.

• 其次利用粒子模拟的电磁模型分别模拟了低压和高压情况下外加弱磁场对容性放电性能的影响,发现低压情况下放电产生的等离子体密度迅速增加;