Then by using software of finite element ANSYS7.0 we optimizaed the piezoelectric thin film microsensor structure, and analyzed the influence of its structural dimension on sensitivity and linearity.

• 然后利用有限元软件ANSYS7.；0进行优化设计，对压电薄膜微传感器的结构尺寸对其线性度和灵敏度的影响进行分析；