The work principle of the non-contact probe is based on a Foucault focus detection method,and contact measurement is found on inductance sensor with micro-force.

• 介绍了一种新型的接触与非接触两用传感器,该传感器的非接触测量方式是基于改进傅科聚焦探测法原理,而接触测量方式则是基于微恒力电感测量原理。