The wafer fabrication environment is quite different from the usual flow shop or job shop environments, with a distinguishing feature being the reentrant flow of the lots through the system.

• 传统上批次操作步骤是以人工方式依过去经验合成的，但这样的作法不但缺乏效率，也很容易出错。本论文尝试根据派屈网来建构整数规划模式，并据以产生出最佳物料输送的操作步骤。