The transmission of ITO films is greatly improved by the heat treatments in all atmospheres.The electrical properties of ITO films annealed in ammonia are better than in other two atmospheres.

• 结果发现在不同气氛下热处理均能明显提高ITO薄膜在可见光区的透过率,氨气气氛下更有利于薄膜导电特性的改善。