The themes of this thesis, heteroepitaxy and ion implantation, are two areas that have been very actively researched in the last two decades.

• 当元件尺度持续缩小至奈米尺度阶段时，深入了解未来先进奈米元件中金属薄膜与半导体基材间之界面反应是相当重要的一项课题。