The techniques of depositing zinc thin film on grass substrate by vacuum evaporation and direct-current sputtering were investigated with XRD, SEM and AFM in this paper.

• 本论文对真空蒸发法和直流溅射法沉积锌膜的工艺进行了研究,结合XRD、SEM、AFM等分析手段,以探索这两种方法在制备锌膜方面的一般规律。