The surface morphology and properties of the thin-films were investigated by four-point probe(FPP)sheet resistance measurement, AFM,SEM,Alpha-step IQ profilers and XRD,also the effects of N and AI doping on diffusion barrier property were discussed.

• 用四探针电阻测试仪(FPP)、AFM、SEM、Alpha-step IQ台阶仪和XRD等分析测试方法对样品的形貌结构与特性进行了分析表征,并对N和Al的掺杂机理进行了讨论。