The structure and working principle of the pumps consisted of two PZT actuators were introduced,and the output performance of the pumps with different structure and driving strategy was analyzed.

• 介绍了两个压电振子所构成的两腔串联和两腔并联压电泵的结构及工作原理,分析了两个压电振子驱动方式(同步工作和交叉工作)对两种结构压电泵输出性能的影响规律。