The structure and the function of multi-arc and sputtering coating machine are reviewed, and the coating properties of TiN+Au (IPG) are prepared by this kind of machine discussed.

• 摘要本文回顾了多弧-磁控溅射多功能离子镀膜设备的结构和功能，并且对该设备在氮化钛掺金离子镀(IPG)方面的典型应用，做了较为详细的膜层性能分析。