The result show that Parylene C coatings have excellent performances and can be deposited uniformly on the surface of workpieces with complicated shape for good protection.

• 结果表明聚氯代对二甲苯涂膜具有优异的综合性能,可以在复杂形状工件表面形成均匀涂膜,对被涂覆材料起到很好的保护作用。