The result provides the theoretic basis to improve the symmetry of the output curve of the sensor with Barber-Poles and optimize the performance of the AMR sensor.

• 通过对传感器单元制备工艺的不断摸索，解决了工艺过程中磁电阻条腐蚀、Barber图形光刻与磁电阻单元制备各阶段的表面处理等关键的工艺问题，提高了单元器件制备的成品率。