The research was carried out on the effect of deposition parameters on the temperature of the AFM probes.The NCD coated AFM probes was obtained by adding argon to the HFCVD systems.

• 基于NCD膜在AFM探针应用方面的优势，本文开展了NCD涂层AFM探针的制备研究，对沉积过程AFM探针表面温度场进行有限元仿真分析，探究了HFCVD法的工艺参数对探针表面温度的影响。