The problems of process design should be solved in MEMS design, it has an important role in raising the level of MEMS technology through the study about simulation towards the key MEMS process technology based on MEMS CAD software.

• 在MEMS设计中需要解决工艺设计的问题,基于MEMS CAD软件对MEMS关键加工工艺进行仿真研究,对于MEMS工艺水平的提高有着重要的意义。