The principles and methods of the multi-gray level electron beam image recording and electron beam image analysis are presented. The EBR-83 system based on these principles and methods is introduced.

• 本文简要介绍了电子束图象记录、图象解析的原理和方法,介绍了在此基础上建立的EBR-83型电子束数字录象析象系统。