The principle of angle measurement of the laser interferometer is investigated deeply and the main effect factors and errors compensation of the laser interferometer in measuring process are analyzed.
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针对干涉仪的测量原理进行了深入研究,分析了激光干涉仪在机床主旋转轴测量中测量精度的主要影响因素和误差补偿,提出了一种简便、可靠的检测方法。
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