The primary uncertain factors in the elastic modulus measurement of microcomponent by microcantilever deflection are analyzed and the fuzzy mathematic method is introduced to the evaluation process.

• 摘要在介绍悬臂梁法测量微构件弹性模量原理的基础上，分析了测量和评价过程的主要不确定因素，将模糊数学方法引入弹性模量的评价过程。