The photoresist with high resolution is made by reducing the viscosity and the solidification contraction ratio when the elasticity and solidification velocity are taken into account.

• 通过降低黏度和固化收缩率，兼顾弹性和固化速度，开发了适用于微压印工艺的高分辨率抗蚀剂材料，并进行了匀胶、压印和脱模工艺的优化实验。