The paper introduces the application method of cross magnetic field, the performance of DMZ-450 D. C. three pole sputtering apparatus, the quality of sputtered TiC coating and preliminary application of this coating.

• 并介绍了正交磁场的施加方法和DMZ-450型正交电磁场直流三极溅射炉的特性,它所沉积的TiC涂层质量及其初步的应用效果。