The operating principle and method of vacuum leakdetection using quadrupole mass spectrometer(QMS) are introduced,and the leak detection was conducted for UHV and XHV systems experimentally.

• 介绍了使用四极质谱计进行真空检漏的原理和方法,分别对超高和极高真空系统做了检漏实验研究,并取到了满意的结果。