The microstructures and optical properties of the films are examined by a prism coupler,a Fourier transform infrared spectroscopy (FTIR) and an atom force microscopy (AFM).

• 研究了薄膜折射率和淀积速率与工艺参量之间的关系 ,通过棱镜耦合仪、傅里叶变换红外光谱、原子力显微镜等测试手段 ,分析了薄膜的结构和光学特性。