The micro beam with its length in sub millimeter range and its width and thickness in several micrometer range, is integrated monolithically or in hybrid with a diode laser.

• 该微机械臂的典型长度在亚毫米量级，宽度和厚度在数微米量级。微臂同一个半导体激光器单片集成或混合集成成为一个整体。