The investigation results indicated that the calculated binding energy of BCN film depends on reference peak selection, and the correct structures can be obtained when the bonding energy was adjusted by selecting appropriate characteristic peak.

• 分析结果表明:采用不同校正元素得到的BCN薄膜中元素的结合能差别很大,只有采用合适的元素校正荷电效应才能正确的表征薄膜结构;