The interaction among fabrication of ZnO pyroelectric sensors, morphology, crystal structures and mechanical properties of ZnO thin films to improve the responsivity was presented in this study.

• 因此探讨氧化锌薄膜的机械性质、结晶构造及表面型态以改善氧化锌焦电薄膜感测器之响应则是本文研究重点。