The influence of the thickness of SiO2 and La2O3 on the tunneling current is given to compare much different thickness of SiO2 and La2O3 tunneling current on the same equivalent oxide thickness (EOT) condition.

• 在等效氧化层厚度相同的情况下，比较了几种不同的SiO_2层厚度和La_2O_3层厚度结构的隧穿电流的大小，给出了SiO_2层厚度和La_2O_3层厚度对隧穿电流的影响。