The impurity of iron is one major heavy-metal contamination on the silicon wafer.Surface photo-voltage method(SPV) can be used to accurately measure the iron contamination within the silicon wafer.

• 铁杂质是硅片制造过程中常见的重金属沾污，表面光电压(SPV)法可很好地用于测定P型硅中铁杂质。