The importance, application field, current status and development trends of the silicon-based MEMS torsion-mirror optical actuator and the MEMS dynamic testing technique are investigated and analyzed fully.

• 系统地调研和分析了硅微机械扭转镜光致动器及MEMS 动态测试技术研究的重要意义、应用领域、研究现状和发展趋势。