The high quality(Cr,Ti,Al)N films were found to display many strengths,including small crystal grain size,fast deposition rate,high micro-hardness(35 GPa),and strong interfacial adhesion(80 N).

• 结果表明:用此法制备的薄膜为含有多相结构的(Cr,Ti,Al)N多元硬质膜,晶粒细小,沉积速率快,显傲硬度高达35 GPa,结合强度高度达80 N,综合性能优异。