The fabricated devices show the performance compared with that of a fully-depleted SOI MOS FET, even though the process needs to be improved further.
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释义
尽管制备工艺尚须进一步优化,但所制成的双栅晶体管已呈现了可与常规全耗尽SOI MOS FET相比拟的器件特性。
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